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Equipment Productivity Management
Symphony Equipment Server
Fab Automation Applications
Sensor integration
User Issues

The SES software can be used to instantly provide TCP/IP connectivity to existing sensors without any sensor redesign. Sensor manufacturers can use the SES's open Equipment API (EqAPI) to integrate sensors into the SES. All client applications of the SES seamlessly access sensor data through Symphony's standard object-based interfaces. Thus, all of Symphony's data collection and analysis software can be used for sensors.

Use of the SES allows correlation of tool manufacturing data with sensor data for real-time process analysis. Data from tools and from sensors can be imported into the same database to analyze and compare manufacturing trends with the results of sensor measurements. Application of this analysis can significantly improve the manufacturing process, and reduce maintenance and service expenses for both sensor manufacturers and fabs. 

Bill Shade, integrated systems product director of Advanced Energy, commented on the role the eSES software is playing in providing increased productivity.

"The eSES software is an important element in AE's strategy to deliver integrated technology solutions. Symphony has made significant progress toward solving the equipment efficiency dilemma manufacturers currently face by enabling unprecedented, yet safe and secure, access to critical equipment information. AE has integrated the SES software into the RF probe product. Now data from our RF Probe (Z-Scan) is available to applications, and these applications can match probe data to data from the tool, such as recipe name, etc."