The
SES software can be used to instantly provide TCP/IP connectivity to existing
sensors without any sensor redesign. Sensor manufacturers can use the
SES's open Equipment API (EqAPI) to integrate sensors into the SES. All
client applications of the SES seamlessly access sensor data through Symphony's
standard object-based interfaces. Thus, all of Symphony's data collection
and analysis software can be used for sensors.
Use of the SES
allows correlation of tool manufacturing data with sensor data for real-time
process analysis. Data from tools and from sensors can be imported into
the same database to analyze and compare manufacturing trends with the
results of sensor measurements. Application of this analysis can significantly
improve the manufacturing process, and reduce maintenance and service
expenses for both sensor manufacturers and fabs.
Bill Shade, integrated
systems product director of Advanced Energy, commented on the role the eSES software
is playing in providing increased productivity.
"The
eSES software is an important element in AE's strategy to deliver integrated
technology solutions. Symphony has made significant progress toward solving
the equipment efficiency dilemma manufacturers currently face by enabling
unprecedented, yet safe and secure, access to critical equipment information.
AE has integrated the SES software into the RF probe product. Now data
from our RF Probe (Z-Scan) is available to applications, and these applications
can match probe data to data from the tool, such as recipe name, etc."