The hallmark
of the SES is equipment connectivity. Its open architecture makes deployment,
modification, and expansion of a network extremely easy. SES software
works like a network driver for your tool. SES transforms your tool
and connected subsystems into network resources that can be shared
with anyone connected to the network simultaneously from anywhere in the
world.
Once in place,
the SES network allows you to remotely monitor and control your equipment,
and it poises your operation for full e-diagnostic and APC functionality.
Benefits:
Makes equipment
an easy-to-use, sharable resource for multiple applications and users
Provides
remote access to equipment and sensors for monitoring and control
Dramatically
reduces the time required to deploy application software on different
types of process equipment
Enables easy
and rapid retrofits of existing factory automation systems
Supports
SEMATECH's and JEITA's e-Diagnostics initiative
Facilitates
collaboration between tool manufacturers and fabs for more efficient
tool maintenance and troubleshooting
The SES enables
equipment to become shared resources on the network, allowing multiple applications
to concurrently access the tool in real time, much like printer servers
provide access to multiple applications in the office environment. The network
can be an internal LAN, an intranet, or the Internet.
Features:
Advanced web-based administration services and logging
Automated
equipment/host connection management
Pass-through
SECS communications
SECS/HSMS conversion
Built-in
protocol decoding and interpretation
Event and
alarm support
Multi-user
management for access control and arbitration
Connection
to SECS/HSMS tools, sensors, and other equipment using standard drivers
The server resides
at the equipment supervisory control level and manages the communications
between client applications and the equipment through its core
services.