The Symphony Data Collection Manager (DCM) is a data acquisition engine. It runs anywhere on the network, and it communicates with the tool via the SES, over the network. The DCM automatically configures the real time InfoPlus.21 database and populates it with the data from the tool.

The DCM GUI runs in a browser. The user can easily configure and initiate data collection from any client workstation on the network through drop-down menus, and can start and stop data collection without having to go to equipment inside the clean room. A user can review data collection status.

Data Collection Sets (DCS) provide an easy way to configure data collection patterns. A DCS consist of list of variables, defined in the Equipment Definition file. Each DCS is associated with a particular SES server/tool. A user can also set Data Collection Rate. The same Data Collection set can be started on multiple servers.

• Pre-select lists enable a user to create reusable lists of variables (such as wafer id and lot number) to be used in multiple Data Collection Sets, which can to be used on one DCM server and/or copied to other servers.
• A user-friendly GUI allows a user to easily Add, Edit, Copy and Delete pre-select lists, acquisition rules and DCSs.